Koen Gerhardus Winkels

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing a substrate support for a lithographic appa...
- Patent number 12,315,756
- Issue date May 27, 2025
- ASML Netherlands B.V.
- Michael Marinus Anna Steur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support, lithographic apparatus, method for manipulating...
- Patent number 12,242,204
- Issue date Mar 4, 2025
- ASML Netherlands B.V.
- Ruud Antonius Catharina Maria Beerens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for predicting resist deformation
- Patent number 11,914,942
- Issue date Feb 27, 2024
- ASML Netherlands B.V.
- Chrysostomos Batistakis
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for predicting resist deformation
- Patent number 11,709,988
- Issue date Jul 25, 2023
- ASML Netherlands B.V.
- Chrysostomos Batistakis
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Supply system for an extreme ultraviolet light source
- Patent number 10,904,994
- Issue date Jan 26, 2021
- ASML Netherlands B.V.
- Koen Gerhardus Winkels
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Supply system for an extreme ultraviolet light source
- Patent number 10,499,485
- Issue date Dec 3, 2019
- ASML Netherlands B.V.
- Koen Gerhardus Winkels
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Droplet generator for lithographic apparatus, EUV source and lithog...
- Patent number 10,481,498
- Issue date Nov 19, 2019
- ASML Netherlands B.V.
- Johan Frederik Dijksman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for generating radiation
- Patent number 9,442,380
- Issue date Sep 13, 2016
- ASML Netherlands B.V.
- Ramin Badie
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR PREDICTING RESIST DEFORMATION
- Publication number 20230334217
- Publication date Oct 19, 2023
- ASML NETHERLANDS B.V.
- Chrysostomos BATISTAKIS
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE TABLE AND METHOD OF HANDLING A SUBSTRATE
- Publication number 20230048723
- Publication date Feb 16, 2023
- ASML NETHERLANDS B.V.
- Nicolaas TEN KATE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING A SUBSTRATE SUPPORT FOR A LITHOGRAPHIC APPA...
- Publication number 20230004092
- Publication date Jan 5, 2023
- ASML NETHERLANDS B.V.
- Michael Marinus Anna STEUR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT, LITHOGRAPHIC APPARATUS, METHOD FOR MANIPULATING...
- Publication number 20220390850
- Publication date Dec 8, 2022
- ASML NETHERLANDS B.V.
- Ruud Antonius Catharina Maria BEERENS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PREDICTING RESIST DEFORMATION
- Publication number 20220075275
- Publication date Mar 10, 2022
- ASML NETHERLANDS B.V.
- Chrysostomos BATISTAKIS
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUPPLY SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
- Publication number 20200128657
- Publication date Apr 23, 2020
- ASML NETHERLANDS B.V.
- Koen Gerhardus Winkels
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUPPLY SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
- Publication number 20180368242
- Publication date Dec 20, 2018
- ASML NETHERLANDS B.V.
- Koen Gerhardus Winkels
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DROPLET GENERATOR FOR LITHOGRAPHIC APPARATUS, EUV SOURCE AND LITHOG...
- Publication number 20180364580
- Publication date Dec 20, 2018
- ASML NETHERLANDS B.V.
- Johan Frederik Dijksman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and Apparatus for Generating Radiation
- Publication number 20150268559
- Publication date Sep 24, 2015
- ASML NETHERLANDS B.V.
- Ramin Badie
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Koen Gerhardus Winkels

Person

Patents Grantslast 30 patents

Method of manufacturing a substrate support for a lithographic appa...

Substrate support, lithographic apparatus, method for manipulating...

Method for predicting resist deformation

Method for predicting resist deformation

Supply system for an extreme ultraviolet light source

Supply system for an extreme ultraviolet light source

Droplet generator for lithographic apparatus, EUV source and lithog...

Method and apparatus for generating radiation

Patents Applicationslast 30 patents

METHOD FOR PREDICTING RESIST DEFORMATION

SUBSTRATE TABLE AND METHOD OF HANDLING A SUBSTRATE

METHOD OF MANUFACTURING A SUBSTRATE SUPPORT FOR A LITHOGRAPHIC APPA...

SUBSTRATE SUPPORT, LITHOGRAPHIC APPARATUS, METHOD FOR MANIPULATING...

METHOD FOR PREDICTING RESIST DEFORMATION

SUPPLY SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE

SUPPLY SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE

DROPLET GENERATOR FOR LITHOGRAPHIC APPARATUS, EUV SOURCE AND LITHOG...

Method and Apparatus for Generating Radiation