Koen Jacobus Johannes Maria Zaal

Person

Eindhoven, NL

People

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20090033905
- Publication date Feb 5, 2009
- ASML NETHERLANDS B.V.
- Bob STREEFKERK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing method and method of c...
- Publication number 20070146664
- Publication date Jun 28, 2007
- ASML NETHERLANDS B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of calibrating a lithographic apparatus and device manufactu...
- Publication number 20070058152
- Publication date Mar 15, 2007
- ASML NETHERLANDS B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic method
- Publication number 20070052940
- Publication date Mar 8, 2007
- ASML NETHERLANDS B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Using unflatness information of the substrate table or mask table f...
- Publication number 20060114436
- Publication date Jun 1, 2006
- ASML NETHERLANDS B.V.
- Rene Oesterholt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Movable carriage for a lithographic apparatus and device manufactur...
- Publication number 20060011855
- Publication date Jan 19, 2006
- ASML NETHERLANDS B.V.
- Martinus Arnoldus Henricus Terken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, article support member, and method
- Publication number 20050248746
- Publication date Nov 10, 2005
- ASML NETHERLAND B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Electrostatic clamp assembly for a lithographic apparatus
- Publication number 20050174555
- Publication date Aug 11, 2005
- ASML NETHERLANDS B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing method, and device man...
- Publication number 20050134829
- Publication date Jun 23, 2005
- ASML NETHERLANDS B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20050128463
- Publication date Jun 16, 2005
- ASML NETHERLANDS B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20050117141
- Publication date Jun 2, 2005
- ASML NETHERLANDS B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing method, and device man...
- Publication number 20050030515
- Publication date Feb 10, 2005
- ASML NETHERLANDS B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing method, and device man...
- Publication number 20050024620
- Publication date Feb 3, 2005
- ASML NETHERLANDS B.V.
- Tjarko Adriaan Rudolf Van Empel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and method of a manufacturing device
- Publication number 20050002010
- Publication date Jan 6, 2005
- ASML NETHERLANDS B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Koen Jacobus Johannes Maria Zaal

Person

Patents Applicationslast 30 patents

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Lithographic apparatus, device manufacturing method and method of c...

Method of calibrating a lithographic apparatus and device manufactu...

Lithographic method

Using unflatness information of the substrate table or mask table f...

Movable carriage for a lithographic apparatus and device manufactur...

Lithographic apparatus, article support member, and method

Electrostatic clamp assembly for a lithographic apparatus

Lithographic apparatus, device manufacturing method, and device man...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Lithographic apparatus and device manufacturing method

Lithographic apparatus, device manufacturing method, and device man...

Lithographic apparatus, device manufacturing method, and device man...

Lithographic apparatus and method of a manufacturing device