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Koen Jacobus Johannes Maria ZAAL
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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
11,669,021
Issue date
Jun 6, 2023
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
11,275,316
Issue date
Mar 15, 2022
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection system and mirror and radiation source for a lithographi...
Patent number
11,150,560
Issue date
Oct 19, 2021
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G02 - OPTICS
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,761,433
Issue date
Sep 1, 2020
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection system and mirror and radiation source for a lithographi...
Patent number
10,732,511
Issue date
Aug 4, 2020
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G02 - OPTICS
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,222,711
Issue date
Mar 5, 2019
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection system and minor and radiation source for a lithographic...
Patent number
10,216,093
Issue date
Feb 26, 2019
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,851,644
Issue date
Dec 26, 2017
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Stage system and lithographic apparatus comprising such stage system
Patent number
9,785,060
Issue date
Oct 10, 2017
ASML Netherlands B.V.
Ruud Antonius Catharina Maria Beerens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,618,859
Issue date
Apr 11, 2017
ASML Netherlands B.V.
Adrianus Hendrik Koevoets
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,581,916
Issue date
Feb 28, 2017
ASML Netherlands B.V.
Joost Jeroen Ottens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,494,869
Issue date
Nov 15, 2016
ASML Netherlands B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Support, lithographic apparatus and device manufacturing method
Patent number
9,470,969
Issue date
Oct 18, 2016
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,436,096
Issue date
Sep 6, 2016
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus comprising a support for holding an object,...
Patent number
9,195,150
Issue date
Nov 24, 2015
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,188,882
Issue date
Nov 17, 2015
ASML Netherlands B.V.
Joost Jeroen Ottens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and substrate...
Patent number
8,947,636
Issue date
Feb 3, 2015
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,947,631
Issue date
Feb 3, 2015
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,941,810
Issue date
Jan 27, 2015
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,749,754
Issue date
Jun 10, 2014
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,743,339
Issue date
Jun 3, 2014
ASML Netherlands
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for contactless handling of an object
Patent number
8,616,598
Issue date
Dec 31, 2013
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,553,201
Issue date
Oct 8, 2013
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,514,365
Issue date
Aug 20, 2013
ASML Netherlands B.V.
Frederik Eduard De Jong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measurement system and lithographic apparatus for measuring a posit...
Patent number
8,457,385
Issue date
Jun 4, 2013
ASML Netherlands B.V.
Marc Wilhelmus Maria Van Der Wijst
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20220197154
Publication date
Jun 23, 2022
ASML NETHERLANDS B.V.
Koen Jacobus Johannes Maria ZAAL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20200393768
Publication date
Dec 17, 2020
ASML NETHERLANDS B.V.
Koen Jacobus Johannes Maria ZAAL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Projection System and Mirror and Radiation Source for a Lithographi...
Publication number
20200285155
Publication date
Sep 10, 2020
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
G02 - OPTICS
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20190196342
Publication date
Jun 27, 2019
ASML NETHERLANDS B.V.
Koen Jacobus Johannes Maria ZAAL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Projection System and Mirror and Radiation Source for a Lithographi...
Publication number
20190171109
Publication date
Jun 6, 2019
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20180113388
Publication date
Apr 26, 2018
ASML NETHERLANDS B.V.
Koen Jacobus Johannes Maria ZAAL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20160349629
Publication date
Dec 1, 2016
ASML NETHERLANDS B.V.
Koen Jacobus Johannes Maria ZAAL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ROTATABLE FRAME, LITHOGRAPHIC APPARATUS, PROJECTION SYSTEM, METHOD...
Publication number
20160349628
Publication date
Dec 1, 2016
ASML NETHERLANDS B.V.
Arno Jan BLEEKER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Projection System and Mirror and Radiation Source for a Lithographi...
Publication number
20150323872
Publication date
Nov 12, 2015
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
G02 - OPTICS
Information
Patent Application
STAGE SYSTEM AND LITHOGRAPHIC APPARATUS COMPRISING SUCH STAGE SYSTEM
Publication number
20150227060
Publication date
Aug 13, 2015
ASML NETHERLANDS B.V.
Ruud Antonius Catharina Maria Beerens
G01 - MEASURING TESTING
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20150116676
Publication date
Apr 30, 2015
ASML NETHERLANDS B.V.
Koen Jacobus Johannes Maria ZAAL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Rotatable Frame For a Lithographic Apparatus
Publication number
20150034788
Publication date
Feb 5, 2015
ASML NETHERLANDS B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus Comprising a Support for Holding an Object,...
Publication number
20150002832
Publication date
Jan 1, 2015
ASML NETHERLANDS B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20140340666
Publication date
Nov 20, 2014
ASML NETHERLANDS B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Device Manufacturing Method
Publication number
20140340659
Publication date
Nov 20, 2014
ASML NETHERLANDS B.V.
Jan Bernard Plechelmus Van Schoot
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Support, Lithographic Apparatus and Device Manufacturing Method
Publication number
20130164688
Publication date
Jun 27, 2013
ASML NETHERLANDS B.V.
Theodorus Petrus Maria CADEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050269525
Publication date
Dec 8, 2005
ASML NETHERLANDS B.V.
Martinus Arnoldus Henricus Terken
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY