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last 30 patents
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Patent Grant
Substrate table, immersion lithographic apparatus and device manufa...
Patent number
12,197,140
Issue date
Jan 14, 2025
ASML Netherlands B.V.
Marco Koert Stavenga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fluid handling system and lithographic apparatus
Patent number
12,072,636
Issue date
Aug 27, 2024
ASML Netherlands B.V.
Theodorus Wilhelmus Polet
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate table, immersion lithographic apparatus and device manufa...
Patent number
11,215,933
Issue date
Jan 4, 2022
ASML Netherlands B.V.
Marco Koert Stavenga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic apparatus and method
Patent number
10,591,828
Issue date
Mar 17, 2020
ASML Netherlands B.V.
Thibault Simon Mathieu Laurent
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Object holder and lithographic apparatus
Patent number
10,481,502
Issue date
Nov 19, 2019
ASML Netherlands B.V.
Thibault Simon Mathieu Laurent
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate table, immersion lithographic apparatus and device manufa...
Patent number
10,451,980
Issue date
Oct 22, 2019
ASML Netherlands B.V.
Marco Koert Stavenga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic apparatus and a method of manufacturing a lithographic...
Patent number
10,324,384
Issue date
Jun 18, 2019
ASML Netherlands B.V.
Gerben Pieterse
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,268,127
Issue date
Apr 23, 2019
ASML Netherlands B.V.
Michel Riepen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
10,203,611
Issue date
Feb 12, 2019
ASML Netherlands B.V.
Thibault Simon Mathieu Laurent
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, drying device, metrology apparatus and devi...
Patent number
10,018,925
Issue date
Jul 10, 2018
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Immersion lithographic apparatus and device manufacturing method
Patent number
10,001,712
Issue date
Jun 19, 2018
ASML Netherlands B.V.
Theodorus Wilhelmus Polet
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Object holder and lithographic apparatus
Patent number
9,915,877
Issue date
Mar 13, 2018
ASML Netherlands B.V.
Thibault Simon Mathieu Laurent
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
9,823,589
Issue date
Nov 21, 2017
ASML Netherlands B.V.
Thibault Simon Mathieu Laurent
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Object holder and lithographic apparatus
Patent number
9,785,055
Issue date
Oct 10, 2017
ASML Netherlands B.V.
Thibault Simon Mathieu Laurent
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,645,506
Issue date
May 9, 2017
ASML Netherlands B.V.
Michel Riepen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate table, immersion lithographic apparatus and device manufa...
Patent number
9,625,833
Issue date
Apr 18, 2017
ASML Netherlands B.V.
Marco Koert Stavenga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, drying device, metrology apparatus and devi...
Patent number
9,606,429
Issue date
Mar 28, 2017
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
9,298,107
Issue date
Mar 29, 2016
ASML Netherlands B.V.
Thibault Simon Mathieu Laurent
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
9,195,147
Issue date
Nov 24, 2015
ASML Netherlands B.V.
Koen Steffens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate table, immersion lithographic apparatus and device manufa...
Patent number
9,059,228
Issue date
Jun 16, 2015
ASML Netherlands B.V.
Marco Koert Stavenga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, drying device, metrology apparatus and devi...
Patent number
8,953,142
Issue date
Feb 10, 2015
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and a device manufacturing method
Patent number
8,755,026
Issue date
Jun 17, 2014
ASML Netherlands B.V.
Jeroen Gerard Gosen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluid handling structure, a lithographic apparatus and a device man...
Patent number
8,711,326
Issue date
Apr 29, 2014
ASML Netherlands B.V.
Ronald Van Der Ham
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,681,308
Issue date
Mar 25, 2014
ASML Netherlands B.V.
Paul Petrus Joannes Berkvens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,634,053
Issue date
Jan 21, 2014
ASML Netherlands B.V.
Michel Riepen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluid handling structure, lithographic apparatus and device manufac...
Patent number
8,508,712
Issue date
Aug 13, 2013
ASML Netherlands B.V.
Clemens Johannes Gerardus Van Den Dungen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluid handling structure, lithographic apparatus and device manufac...
Patent number
8,472,003
Issue date
Jun 25, 2013
ASML Netherlands B.V.
Hrishikesh Patel
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Fluid handling structure, lithographic apparatus and device manufac...
Patent number
8,421,993
Issue date
Apr 16, 2013
ASML Netherlands B.V.
Daniel Jozef Maria Direcks
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluid handling device, an immersion lithographic apparatus and a de...
Patent number
8,416,388
Issue date
Apr 9, 2013
ASML Netherlands B.V.
Erik Henricus Egidius Catharina Eummelen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, a method of controlling the apparatus and a...
Patent number
8,405,817
Issue date
Mar 26, 2013
ASML Netherlands B.V.
Marco Koert Stavenga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
FLUID HANDLING SYSTEM AND LITHOGRAPHIC APPARATUS
Publication number
20240192607
Publication date
Jun 13, 2024
ASML NETHERLANDS B.V.
Theodorus Wilhelmus POLET
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TABLE, IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...
Publication number
20220121131
Publication date
Apr 21, 2022
ASML NETHERLANDS B.V.
Marco Koert STAVENGA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TABLE, IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...
Publication number
20200050116
Publication date
Feb 13, 2020
ASML NETHERLANDS B.V.
Marco Koert STAVENGA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20190171113
Publication date
Jun 6, 2019
ASML NETHERLANDS B.V.
Thibault Simon Mathieu LAURENT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, DRYING DEVICE, METROLOGY APPARATUS AND DEVI...
Publication number
20180292762
Publication date
Oct 11, 2018
ASML NETHERLANDS B.V.
Nicolaas Rudolf KEMPER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OBJECT HOLDER AND LITHOGRAPHIC APPARATUS
Publication number
20180267412
Publication date
Sep 20, 2018
ASML NETHERLANDS B.V.
Thibault Simon Mathieu LAURENT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF MANUFACTURING A LITHOGRAPHIC...
Publication number
20180210350
Publication date
Jul 26, 2018
ASML NETHERLANDS B.V.
Gerben PIETERSE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20180074411
Publication date
Mar 15, 2018
ASML NETHERLANDS B.V.
Thibault Simon Mathieu Laurent
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OBJECT HOLDER AND LITHOGRAPHIC APPARATUS
Publication number
20170315454
Publication date
Nov 2, 2017
ASML NETHERLANDS B.V.
Thibault Simon Mathieu LAURENT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20170242348
Publication date
Aug 24, 2017
ASML NETHERLANDS B.V.
Michel RIEPEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TABLE, IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...
Publication number
20170219936
Publication date
Aug 3, 2017
ASML NETHERLANDS B.V.
Marco Koert STAVENGA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20170219939
Publication date
Aug 3, 2017
ASML NETHERLANDS B.V.
Theodorus Wilhelmus POLET
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, DRYING DEVICE, METROLOGY APPARATUS AND DEVI...
Publication number
20170192365
Publication date
Jul 6, 2017
ASML NETHERLANDS B.V.
Nicolaas Rudolf KEMPER
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20160202618
Publication date
Jul 14, 2016
ASML NETHERLANDS B.V.
Thibault Simon Mathieu LAURENT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TABLE, IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...
Publication number
20150277238
Publication date
Oct 1, 2015
ASML NETHERLANDS B.V.
Marco Koert STAVENGA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OBJECT HOLDER AND LITHOGRAPHIC APPARATUS
Publication number
20150131064
Publication date
May 14, 2015
ASML NETHERLANDS B.V.
Thibault Simon Mathieu Laurent
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, DRYING DEVICE, METROLOGY APPARATUS AND DEVI...
Publication number
20150015857
Publication date
Jan 15, 2015
ASML NETHERLANDS B.V.
Nicolaas Rudolf KEMPER
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20140098353
Publication date
Apr 10, 2014
ASML NETHERLANDS B.V.
Michel RIEPEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20120013865
Publication date
Jan 19, 2012
ASML NETHERLANDS B.V.
Thibault Simon Mathieu LAURENT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MAN...
Publication number
20110292357
Publication date
Dec 1, 2011
ASML NETHERLANDS B.V.
Ronald Van Der Ham
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
Publication number
20110149258
Publication date
Jun 23, 2011
ASML NETHERLANDS B.V.
Jeroen Gerard Gosen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFAC...
Publication number
20110005603
Publication date
Jan 13, 2011
ASML NETHERLANDS B.V.
Hrishikesh Patel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TABLE, IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...
Publication number
20100277709
Publication date
Nov 4, 2010
ASML NETHERLANDS B.V.
Marco Koert STAVENGA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLUID HANDLING DEVICE, AN IMMERSION LITHOGRAPHIC APPARATUS AND A DE...
Publication number
20100259735
Publication date
Oct 14, 2010
ASML NETHERLANDS B.V.
Erik Henricus Egidius Catharina Eummelen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, A METHOD OF CONTROLLING THE APPARATUS AND A...
Publication number
20100214543
Publication date
Aug 26, 2010
ASML NETHERLANDS B.V.
Marco Koert Stavenga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100110410
Publication date
May 6, 2010
ASML NETHERLANDS B.V.
KOEN STEFFENS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFAC...
Publication number
20100103391
Publication date
Apr 29, 2010
ASML NETHERLANDS B.V.
Clemens Johannes Gerardus VAN DEN DUNGEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, DRYING DEVICE, METROLOGY APPARATUS AND DEVI...
Publication number
20100045950
Publication date
Feb 25, 2010
ASML NETHERLANDS B.V.
Nicolaas Rudolf Kemper
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFAC...
Publication number
20090279062
Publication date
Nov 12, 2009
ASML NETHERLANDS B.V.
Daniel Jozef Maria DIRECKS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFAC...
Publication number
20090279060
Publication date
Nov 12, 2009
ASML NETHERLANDS B.V.
Daniel Jozef Maria DIRECKS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY