Koen Van Ingen Schenau

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and device manufacturing method with correct...
- Patent number 9,170,500
- Issue date Oct 27, 2015
- ASML Netherlands B.V.
- Jan Bernard Plechelmus Van Schoot
- G02 - OPTICS
Information Patent Grant
Illumination system, lithographic apparatus and method of forming a...
- Patent number 9,134,629
- Issue date Sep 15, 2015
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for lithographic apparatus with control system...
- Patent number 9,052,605
- Issue date Jun 9, 2015
- ASML Netherlands B.V.
- Koen Van Ingen Schenau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,304,180
- Issue date Nov 6, 2012
- ASML Netherlands B.V.
- Koen Van Ingen Schenau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Anti-reflection coating for an EUV mask
- Patent number 7,736,820
- Issue date Jun 15, 2010
- ASML Netherlands B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method for predicting a critical dimension of a feature imaged by a...
- Patent number 7,443,486
- Issue date Oct 28, 2008
- ASML Netherlands B.V.
- Koen Van Ingen Schenau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method and substrate
- Patent number 7,307,687
- Issue date Dec 11, 2007
- ASML Netherlands B.V.
- Johannes Anna Quaedackers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
- Patent number 7,088,421
- Issue date Aug 8, 2006
- ASML Netherlands B.V.
- Koen Van Ingen Schenau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device manufacturing method and computer program
- Patent number 7,042,550
- Issue date May 9, 2006
- ASML Netherlands B.V.
- Martin Lowisch
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120262689
- Publication date Oct 18, 2012
- ASML Netherlands B.V.
- Koen Van Ingen Schenau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120229787
- Publication date Sep 13, 2012
- ASML NETHERLANDS B.V.
- Jan Bernard Plechelmus Van Schoot
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD OF FORMING A...
- Publication number 20120013882
- Publication date Jan 19, 2012
- ASML NETHERLANDS B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic device manufacturing method, lithographic cell, and co...
- Publication number 20080160458
- Publication date Jul 3, 2008
- ASML NETHERLANDS B.V.
- Koen Van Ingen Schenau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing method and substrate
- Publication number 20070216883
- Publication date Sep 20, 2007
- ASML NETHERLANDS B.V.
- Johannes Anna Quaedackers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Koen Van Ingen Schenau

Person

Patents Grantslast 30 patents

Lithographic apparatus and device manufacturing method with correct...

Illumination system, lithographic apparatus and method of forming a...

Illumination system for lithographic apparatus with control system...

Lithographic apparatus and device manufacturing method

Anti-reflection coating for an EUV mask

Method for predicting a critical dimension of a feature imaged by a...

Lithographic apparatus, device manufacturing method and substrate

Lithographic apparatus, device manufacturing method, and device man...

Device manufacturing method and computer program

Patents Applicationslast 30 patents

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

ILLUMINATION SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD OF FORMING A...

Lithographic device manufacturing method, lithographic cell, and co...

Lithographic apparatus, device manufacturing method and substrate