Koen Van Ingen Schenau

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Veldhoven, NL

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Patents Applicationslast 30 patents

Information Patent Application
Anti-reflection coating for an EUV mask
- Publication number 20070259275
- Publication date Nov 8, 2007
- ASML NETHERLANDS B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- G02 - OPTICS
Information Patent Application
Lithography measurements using scatterometry
- Publication number 20060192936
- Publication date Aug 31, 2006
- ASML NETHERLANDS B.V.
- Koen Van Ingen Schenau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060057471
- Publication date Mar 16, 2006
- ASML NETHERLANDS B.V.
- Koen Van Ingen Schenau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Device manufacturing method and computer program
- Publication number 20040137677
- Publication date Jul 15, 2004
- ASML NETHERLANDS B.V.
- Martin Lowisch
- B82 - NANO-TECHNOLOGY
Information Patent Application
Lithographic apparatus, device manufacturing method, and device man...
- Publication number 20040105081
- Publication date Jun 3, 2004
- ASML NETHERLANDS B.V.
- Koen Van Ingen Schenau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY