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Koenraad Remi André Maria Schreel
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Veldhoven, NL
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last 30 patents
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Patent Grant
Method of measuring a parameter of a patterning process, metrology...
Patent number
11,150,563
Issue date
Oct 19, 2021
ASML Netherlands B.V.
Sergei Sokolov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Calibration method for a lithographic apparatus
Patent number
10,884,345
Issue date
Jan 5, 2021
ASML Netherlands B.V.
Emil Peter Schmitt-Weaver
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Calibration method for a lithographic apparatus
Patent number
10,627,729
Issue date
Apr 21, 2020
ASML Netherlands B.V.
Emil Peter Schmitt-Weaver
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,217,916
Issue date
Dec 22, 2015
ASML Netherlands B.V.
Paul Christiaan Hinnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Calibration Method for a Lithographic Apparatus
Publication number
20200218170
Publication date
Jul 9, 2020
ASML NETHERLANDS B.V.
Emil Peter SCHMITT-WEAVER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF MEASURING A PARAMETER OF A PATTERNING PROCESS, METROLOGY...
Publication number
20200192230
Publication date
Jun 18, 2020
ASML NETHERLANDS B.V.
Sergei SOKOLOV
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Calibration Method for a Lithographic Apparatus
Publication number
20180173118
Publication date
Jun 21, 2018
ASML NETHERLANDS B.V.
Emil Peter SCHMITT-WEAVER
G05 - CONTROLLING REGULATING