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Polishing apparatus
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Patent number 7,632,378
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Issue date Dec 15, 2009
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Ebara Corporation
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Kunihiko Sakurai
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B24 - GRINDING POLISHING
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Polishing apparatus
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Patent number 6,878,044
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Issue date Apr 12, 2005
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Ebara Corporation
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Kunihiko Sakurai
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B24 - GRINDING POLISHING
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Polishing apparatus
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Patent number 6,682,408
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Issue date Jan 27, 2004
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Ebara Corporation
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Kunihiko Sakurai
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B24 - GRINDING POLISHING
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Polishing apparatus
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Patent number 6,358,128
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Issue date Mar 19, 2002
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Ebara Corporation
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Kunihiko Sakurai
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B24 - GRINDING POLISHING
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Polishing apparatus
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Patent number 6,354,922
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Issue date Mar 12, 2002
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Ebara Corporation
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Kunihiko Sakurai
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B24 - GRINDING POLISHING
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