Koh Fuwa

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Conductive thin film manufacturing method
- Patent number 10,982,323
- Issue date Apr 20, 2021
- ULV AC, INC.
- Ken Maehira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device, method of manufacturing the device, and method of manufactu...
- Patent number 10,568,607
- Issue date Feb 25, 2020
- ULVAC, Inc.
- Taichi Suzuki
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Electrostatic chuck for an electrically insulative substrate, and a...
- Patent number 7,209,339
- Issue date Apr 24, 2007
- ULVAC, Inc.
- Tetsuo Kitabayashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Chuck equipment
- Patent number 6,781,812
- Issue date Aug 24, 2004
- Nihon Shinku Gijutsu Kabushiki Kaisha
- Koh Fuwa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck and processing apparatus for insulative substrate
- Patent number 6,768,627
- Issue date Jul 27, 2004
- Toto Ltd.
- Tetsuo Kitabayashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
CONDUCTIVE THIN FILM MANUFACTURING METHOD
- Publication number 20200248301
- Publication date Aug 6, 2020
- ULVAC, Inc.
- Ken MAEHIRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE, METHOD OF MANUFACTURING THE DEVICE, AND METHOD OF MANUFACTU...
- Publication number 20190290244
- Publication date Sep 26, 2019
- ULVAC, Inc.
- Taichi SUZUKI
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
VACUUM PROCESSING DEVICE AND VACUUM PROCESSING METHOD
- Publication number 20140158301
- Publication date Jun 12, 2014
- ULVAC, Inc.
- Ken MAEHIRA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD FOR THE PRODUCTION OF MULTI-STEPPED SUBSTRATE
- Publication number 20110089141
- Publication date Apr 21, 2011
- ULVAC,INC.
- Ai Tanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electrostatic chuck for an electrically insulative substrate, and a...
- Publication number 20040218340
- Publication date Nov 4, 2004
- Toto, Ltd.
- Tetsuo Kitabayashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Chuck equipment
- Publication number 20020135967
- Publication date Sep 26, 2002
- NIHON SHINKU GIJUTSU KABUSHIKI KAISHA
- Koh Fuwa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...