Kohei KAWAKAMI

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Coating apparatus and coating method
- Patent number 12,151,255
- Issue date Nov 26, 2024
- Tokyo Electron Limited
- Hideki Kajiwara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Nozzle standby device, liquid processing apparatus and operation me...
- Patent number 11,862,485
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Satoshi Shimmura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid treatment apparatus and method of adjusting temperature of t...
- Patent number 11,860,542
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Takashi Yamauchi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating apparatus and coating method
- Patent number 11,752,515
- Issue date Sep 12, 2023
- Tokyo Electron Limited
- Hideki Kajiwara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Liquid treatment apparatus and method of adjusting temperature of t...
- Patent number 11,561,473
- Issue date Jan 24, 2023
- Tokyo Electron Limited
- Takashi Yamauchi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating treatment method with airflow control, and non-transitory r...
- Patent number 9,947,534
- Issue date Apr 17, 2018
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and development treatment system with airflow control inclu...
- Patent number 9,162,247
- Issue date Oct 20, 2015
- Tokyo Electron Limited
- Kousuke Yoshihara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
CUP, LIQUID PROCESSING APPARATUS, AND LIQUID PROCESSING METHOD
- Publication number 20240226954
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Ryunosuke Higashi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
CUP, LIQUID PROCESSING APPARATUS, AND LIQUID PROCESSING METHOD
- Publication number 20240131554
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Ryunosuke Higashi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20240012329
- Publication date Jan 11, 2024
- TOKYO ELECTRON LIMITED
- Junghyun KIM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20240009697
- Publication date Jan 11, 2024
- TOKYO ELECTRON LIMITED
- Junghyun KIM
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COATING APPARATUS AND COATING METHOD
- Publication number 20230347369
- Publication date Nov 2, 2023
- TOKYO ELECTRON LIMITED
- Hideki KAJIWARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
LIQUID TREATMENT APPARATUS AND METHOD OF ADJUSTING TEMPERATURE OF T...
- Publication number 20230152703
- Publication date May 18, 2023
- TOKYO ELECTRON LIMITED
- Takashi YAMAUCHI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
NOZZLE STANDBY DEVICE, LIQUID PROCESSING APPARATUS AND OPERATION ME...
- Publication number 20220084844
- Publication date Mar 17, 2022
- TOKYO ELECTRON LIMITED
- Satoshi Shimmura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID TREATMENT APPARATUS AND METHOD OF ADJUSTING TEMPERATURE OF T...
- Publication number 20210181638
- Publication date Jun 17, 2021
- TOKYO ELECTRON LIMITED
- Takashi YAMAUCHI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COATING APPARATUS AND COATING METHOD
- Publication number 20200391238
- Publication date Dec 17, 2020
- TOKYO ELECTRON LIMITED
- Hideki KAJIWARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COATING TREATMENT METHOD WITH AIRFLOW CONTROL, AND NON-TRANSITORY R...
- Publication number 20150371853
- Publication date Dec 24, 2015
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- H01 - BASIC ELECTRIC ELEMENTS

Kohei KAWAKAMI

Person

Patents Grantslast 30 patents

Coating apparatus and coating method

Nozzle standby device, liquid processing apparatus and operation me...

Liquid treatment apparatus and method of adjusting temperature of t...

Coating apparatus and coating method

Liquid treatment apparatus and method of adjusting temperature of t...

Coating treatment method with airflow control, and non-transitory r...

Coating and development treatment system with airflow control inclu...

Patents Applicationslast 30 patents

CUP, LIQUID PROCESSING APPARATUS, AND LIQUID PROCESSING METHOD

CUP, LIQUID PROCESSING APPARATUS, AND LIQUID PROCESSING METHOD

LIQUID PROCESSING APPARATUS

LIQUID PROCESSING APPARATUS

COATING APPARATUS AND COATING METHOD

LIQUID TREATMENT APPARATUS AND METHOD OF ADJUSTING TEMPERATURE OF T...

NOZZLE STANDBY DEVICE, LIQUID PROCESSING APPARATUS AND OPERATION ME...

LIQUID TREATMENT APPARATUS AND METHOD OF ADJUSTING TEMPERATURE OF T...

COATING APPARATUS AND COATING METHOD

COATING TREATMENT METHOD WITH AIRFLOW CONTROL, AND NON-TRANSITORY R...