Kohei Kawamura

Person

Hillsboro, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Placing bed structure, treating apparatus using the structure, and...
- Patent number 10,388,557
- Issue date Aug 20, 2019
- Tokyo Electron Limited
- Kohei Kawamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Placing bed structure, treating apparatus using the structure, and...
- Patent number 9,177,846
- Issue date Nov 3, 2015
- Tokyo Electron Limited
- Kohei Kawamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method for a semiconductor
- Patent number 8,435,882
- Issue date May 7, 2013
- Tokyo Electron Limited
- Takaaki Matsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method for a semiconductor
- Patent number 8,197,913
- Issue date Jun 12, 2012
- Tokyo Electron Limited
- Takaaki Matsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication method of a semiconductor device and a semiconductor de...
- Patent number 8,124,523
- Issue date Feb 28, 2012
- Tokyo Electron Limited
- Kohei Kawamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method for forming a film and an electronic compo...
- Patent number 8,021,975
- Issue date Sep 20, 2011
- Tokyo Electron Limited
- Kotaro Miyatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLACING BED STRUCTURE, TREATING APPARATUS USING THE STRUCTURE, AND...
- Publication number 20160020135
- Publication date Jan 21, 2016
- TOKYO ELECTRON LIMITED
- Kohei Kawamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLACING BED STRUCTURE, TREATING APPARATUS USING THE STRUCTURE, AND...
- Publication number 20100264115
- Publication date Oct 21, 2010
- TOKYO ELECTRON LIMITED
- Kohei Kawamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD FOR A SEMICONDUCTOR
- Publication number 20100117204
- Publication date May 13, 2010
- TOKYO ELECTRON LIMITED
- Takaaki Matsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERLAYER INSULATION FILM, INTERCONNECT STRUCTURE, AND METHODS OF...
- Publication number 20100101834
- Publication date Apr 29, 2010
- NATIONAL UNIVERSITY CORP TOHOKU UNIVERSITY
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FABRICATION METHOD OF A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR DE...
- Publication number 20100025856
- Publication date Feb 4, 2010
- TOKYO ELECTRON LIMITED
- Kohei Kawamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma processing method for forming a film and an electronic compo...
- Publication number 20090026588
- Publication date Jan 29, 2009
- TOKYO ELECTRON LIMITED
- Kotaro Miyatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film forming method for a semiconductor
- Publication number 20090029066
- Publication date Jan 29, 2009
- TOKYO ELECTRON LIMITED
- Takaaki Matsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kohei Kawamura

Person

Patents Grantslast 30 patents

Placing bed structure, treating apparatus using the structure, and...

Placing bed structure, treating apparatus using the structure, and...

Film forming method for a semiconductor

Film forming method for a semiconductor

Fabrication method of a semiconductor device and a semiconductor de...

Plasma processing method for forming a film and an electronic compo...

Patents Applicationslast 30 patents

PLACING BED STRUCTURE, TREATING APPARATUS USING THE STRUCTURE, AND...

PLACING BED STRUCTURE, TREATING APPARATUS USING THE STRUCTURE, AND...

FILM FORMING METHOD FOR A SEMICONDUCTOR

INTERLAYER INSULATION FILM, INTERCONNECT STRUCTURE, AND METHODS OF...

FABRICATION METHOD OF A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR DE...

Plasma processing method for forming a film and an electronic compo...

Film forming method for a semiconductor