Kohei MORI

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate detection method of subst...
- Patent number 9,691,646
- Issue date Jun 27, 2017
- Tokyo Electron Limited
- Kento Kurusu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus and substrate cleaning unit
- Patent number 9,579,695
- Issue date Feb 28, 2017
- Tokyo Electron Limited
- Kohei Mori
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE DETECTION METHOD OF SUBST...
- Publication number 20150318194
- Publication date Nov 5, 2015
- TOKYO ELECTRON LIMITED
- Kento Kurusu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING UNIT
- Publication number 20140041696
- Publication date Feb 13, 2014
- TOKYO ELECTRON LIMITED
- Kohei MORI
- B08 - CLEANING