Kohei NOGUCHI

Person

Koshi-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Foreign substance detection device and foreign substance detection...
- Patent number 11,906,414
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Masato Hayashi
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,879,839
- Issue date Jan 23, 2024
- Tokyo Electron Limited
- Koudai Higashi
- G01 - MEASURING TESTING
Information Patent Grant
Foreign substance detection device and foreign substance detection...
- Patent number 11,402,313
- Issue date Aug 2, 2022
- Tokyo Electron Limited
- Masato Hayashi
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus, substrate processing system, and su...
- Patent number 11,340,152
- Issue date May 24, 2022
- Tokyo Electron Limited
- Masato Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Foreign substance detection device, foreign substance detection met...
- Patent number 11,048,016
- Issue date Jun 29, 2021
- Tokyo Electron Limited
- Masato Hayashi
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus, substrate processing system, and su...
- Patent number 11,002,656
- Issue date May 11, 2021
- Tokyo Electron Limited
- Masato Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,818,654
- Issue date Nov 14, 2017
- Tokyo Electron Limited
- Masato Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240125697
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Koudai Higashi
- G01 - MEASURING TESTING
Information Patent Application
FOREIGN SUBSTANCE DETECTION DEVICE AND FOREIGN SUBSTANCE DETECTION...
- Publication number 20220326133
- Publication date Oct 13, 2022
- TOKYO ELECTRON LIMITED
- Masato Hayashi
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220034802
- Publication date Feb 3, 2022
- TOKYO ELECTRON LIMITED
- Koudai Higashi
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...
- Publication number 20210247286
- Publication date Aug 12, 2021
- TOKYO ELECTRON LIMITED
- Masato HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOREIGN SUBSTANCE DETECTION DEVICE AND FOREIGN SUBSTANCE DETECTION...
- Publication number 20210190661
- Publication date Jun 24, 2021
- TOKYO ELECTRON LIMITED
- Masato Hayashi
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...
- Publication number 20200240891
- Publication date Jul 30, 2020
- TOKYO ELECTRON LIMITED
- Masato HAYASHI
- G01 - MEASURING TESTING
Information Patent Application
FOREIGN SUBSTANCE DETECTION DEVICE, FOREIGN SUBSTANCE DETECTION MET...
- Publication number 20190383963
- Publication date Dec 19, 2019
- TOKYO ELECTRON LIMITED
- Masato Hayashi
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160358829
- Publication date Dec 8, 2016
- TOKYO ELECTRON LIMITED
- Masato HAYASHI
- B08 - CLEANING

Kohei NOGUCHI

Person

Patents Grantslast 30 patents

Foreign substance detection device and foreign substance detection...

Substrate processing apparatus and substrate processing method

Foreign substance detection device and foreign substance detection...

Substrate processing apparatus, substrate processing system, and su...

Foreign substance detection device, foreign substance detection met...

Substrate processing apparatus, substrate processing system, and su...

Substrate processing apparatus and substrate processing method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

FOREIGN SUBSTANCE DETECTION DEVICE AND FOREIGN SUBSTANCE DETECTION...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...

FOREIGN SUBSTANCE DETECTION DEVICE AND FOREIGN SUBSTANCE DETECTION...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...

FOREIGN SUBSTANCE DETECTION DEVICE, FOREIGN SUBSTANCE DETECTION MET...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD