TREA

Kohei SATOU

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  • Tokyo, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 10,665,436
    • Issue date May 26, 2020
    • HITACHI HIGH-TECH CORPORATION
    • Takashi Uemura
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20160372305
    • Publication date Dec 22, 2016
    • Hitachi High-Technologies Corporation
    • Takashi UEMURA
    • H01 - BASIC ELECTRIC ELEMENTS