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Kohei Tanaka

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  • Kyoto, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Ion beam irradiation apparatus
    • Patent number 10,784,075
    • Issue date Sep 22, 2020
    • Nissin ION Equipment Co., Ltd.
    • Shinya Hisada
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer handling method and ion implanter
    • Patent number 8,519,363
    • Issue date Aug 27, 2013
    • Nissin Ion Equipment Co., Ltd.
    • Kohei Tanaka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ion beam measuring method and ion implanting apparatus
    • Patent number 7,655,929
    • Issue date Feb 2, 2010
    • Nissin Ion Equipment Co., Ltd.
    • Sei Umisedo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ion implanter
    • Patent number 7,635,850
    • Issue date Dec 22, 2009
    • Nissin Ion Equipment Co., Ltd.
    • Takatoshi Yamashita
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    ION BEAM IRRADIATION APPARATUS
    • Publication number 20200051776
    • Publication date Feb 13, 2020
    • NISSIN ION EQUIPMENT CO., LTD.
    • Shinya HISADA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ION BEAM IRRADIATION APPARATUS
    • Publication number 20170236686
    • Publication date Aug 17, 2017
    • NISSIN ION EQUIPMENT CO., LTD.
    • Shinya HISADA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ION BEAM IRRADIATION APPARATUS AND METHOD FOR SUBSTRATE COOLING
    • Publication number 20140238637
    • Publication date Aug 28, 2014
    • NISSIN ION EQUIPMENT CO., LTD.
    • Kohei TANAKA
    • F28 - HEAT EXCHANGE IN GENERAL
  • Information Patent Application

    ION BEAM IRRADIATION APPARATUS
    • Publication number 20140238300
    • Publication date Aug 28, 2014
    • NISSIN ION EQUIPMENT CO., LTD.
    • Shinya HISADA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    WAFER HANDLING METHOD AND ION IMPLANTER
    • Publication number 20110248190
    • Publication date Oct 13, 2011
    • NISSIN ION EQUIPMENT CO., LTD.
    • Kohei Tanaka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ION IMPLANTER
    • Publication number 20080135777
    • Publication date Jun 12, 2008
    • Takatoshi Yamashita
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Ion beam measuring method and ion implanting apparatus
    • Publication number 20080073579
    • Publication date Mar 27, 2008
    • NISSIN ION EQUIPMENT CO., LTD.
    • Sei Umisedo
    • H01 - BASIC ELECTRIC ELEMENTS