Kohei YAMAMOTO

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Komaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Ceramic heater and electrostatic chuck
- Patent number 10,483,136
- Issue date Nov 19, 2019
- NGK Spark Plug Co., Ltd.
- Naoya Uemura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CERAMIC HEATER AND ELECTROSTATIC CHUCK
- Publication number 20160307787
- Publication date Oct 20, 2016
- NGK SPARK PLUG CO., LTD.
- Naoya UEMURA
- H01 - BASIC ELECTRIC ELEMENTS