Kohei YAMASHITA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film forming apparatus and shower head
- Patent number 10,844,489
- Issue date Nov 24, 2020
- Tokyo Electron Limited
- Masahide Iwasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and measurement method
- Patent number 9,658,106
- Issue date May 23, 2017
- Tokyo Electron Limited
- Yuuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS AND SHOWER HEAD
- Publication number 20160122873
- Publication date May 5, 2016
- TOKYO ELECTRON LIMITED
- Masahide Iwasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND MEASUREMENT METHOD
- Publication number 20150318220
- Publication date Nov 5, 2015
- TOKYO ELECTRON LIMITED
- Yuuki KOBAYASHI
- G01 - MEASURING TESTING