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Kohichi SATOH

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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    EMBEDDING METHOD AND PROCESSING SYSTEM
    • Publication number 20240153818
    • Publication date May 9, 2024
    • Tokyo Electron Limited
    • Masato SAKAMOTO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND DEVICE FOR MANUF...
    • Publication number 20230377893
    • Publication date Nov 23, 2023
    • TOKYO ELECTRON LIMITED
    • Shunji YAMAKAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION METHOD AND DEPOSITION APPARATUS
    • Publication number 20230272523
    • Publication date Aug 31, 2023
    • TOKYO ELECTRON LIMITED
    • Yuichi FURUYA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SOURCE GAS SUPPLY METHOD, SOURCE GAS SUPPLY MECHANISM, AND FILM FOR...
    • Publication number 20230167555
    • Publication date Jun 1, 2023
    • TOKYO ELECTRON LIMITED
    • Tomoyuki GOMI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM-FORMING METHOD AND FILM-FORMING SYSTEM
    • Publication number 20230090881
    • Publication date Mar 23, 2023
    • TOKYO ELECTRON LIMITED
    • Masato ARAKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR FORMING RUTHENIUM FILM
    • Publication number 20220145451
    • Publication date May 12, 2022
    • TOKYO ELECTRON LIMITED
    • Shunji YAMAKAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20210054503
    • Publication date Feb 25, 2021
    • TOKYO ELECTRON LIMITED
    • Masato ARAKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Placement Apparatus and Processing Apparatus
    • Publication number 20200095680
    • Publication date Mar 26, 2020
    • TOKYO ELECTRON LIMITED
    • Kohichi SATOH
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Embedding Method and Processing System
    • Publication number 20200083098
    • Publication date Mar 12, 2020
    • TOKYO ELECTRON LIMITED
    • Kohichi SATOH
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR FORMING TUNGSTEN FILM
    • Publication number 20190161853
    • Publication date May 30, 2019
    • TOKYO ELECTRON LIMITED
    • Shintaro Aoyama
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE MOUNTING TABLE
    • Publication number 20190153597
    • Publication date May 23, 2019
    • TOKYO ELECTRON LIMITED
    • Kohichi SATOH
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF ETCHING FILM
    • Publication number 20180366337
    • Publication date Dec 20, 2018
    • TOKYO ELECTRON LIMITED
    • Motoko NAKAGOMI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING METHOD
    • Publication number 20180102244
    • Publication date Apr 12, 2018
    • TOKYO ELECTRON LIMITED
    • Kohichi SATOH
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD, STORAGE MEDIUM AND ETCHING APPARATUS
    • Publication number 20150187593
    • Publication date Jul 2, 2015
    • TOKYO ELECTRON LIMITED
    • Kensaku NARUSHIMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TUNGSTEN FILM FORMING METHOD
    • Publication number 20130137262
    • Publication date May 30, 2013
    • TOKYO ELECTRON LIMITED
    • Kohichi SATOH
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF FORMING METALLIC FILM AND PROGRAM-STORING RECORDING MEDIUM
    • Publication number 20090246373
    • Publication date Oct 1, 2009
    • Tokyo Electron Limited
    • Mitsuhiro Tachibana
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...