Kohichi Tanaka

Follow

Person

Nishigoh-mura, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Polishing machine and method of dissipating heat therefrom
- Patent number 5,718,620
- Issue date Feb 17, 1998
- Shin-Etsu Handotai
- Kohichi Tanaka
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 5,549,502
- Issue date Aug 27, 1996
- Fujikoshi Machinery Corp.
- Kohichi Tanaka
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing machine and method of dissipating heat therefrom
- Patent number 5,400,547
- Issue date Mar 28, 1995
- Shin-Etsu Handotai Co., Ltd.
- Kohichi Tanaka
- B24 - GRINDING POLISHING
Information Patent Grant
Method of chucking semiconductor wafers
- Patent number 5,335,457
- Issue date Aug 9, 1994
- Shin-Etsu Handotai Co., Ltd.
- Akira Matsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and an apparatus for handling wafers
- Patent number 5,226,758
- Issue date Jul 13, 1993
- Shin-Etsu Handotai Co., Ltd.
- Kohichi Tanaka
- B24 - GRINDING POLISHING