Kohji Uda

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Alignment apparatus and SOR X-ray exposure apparatus having same
- Patent number 5,822,389
- Issue date Oct 13, 1998
- Canon Kabushiki Kaisha
- Shunichi Uzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment apparatus and SOR x-ray exposure apparatus having same
- Patent number 5,524,131
- Issue date Jun 4, 1996
- Canon Kabushiki Kaisha
- Shunichi Uzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY