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Koichi Hontake
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Koshi-shi, JP
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last 30 patents
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Patent Grant
Coating/developing apparatus and pattern forming method
Patent number
7,924,396
Issue date
Apr 12, 2011
Tokyo Electron Limited
Hisashi Kawano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
COATING/DEVELOPING APPARATUS AND PATTERN FORMING METHOD
Publication number
20080204675
Publication date
Aug 28, 2008
TOKYO ELECTRON LIMITED
Hisashi Kawano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY