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Koichi Katsura
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Chiyoda-Ku, JP
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Patents Grants
last 30 patents
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Patent Grant
Exposure apparatus, device manufacturing method and environmental c...
Patent number
6,784,972
Issue date
Aug 31, 2004
Nikon Corporation
Yoshitomo Nagahashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
FILTER BOX, FILTER APPARATUS, AND EXPOSURE APPARATUS
Publication number
20120170009
Publication date
Jul 5, 2012
Nikon Corporation
Koichi KATSURA
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
FILTER APPARATUS, FILTER ACCOMMODATING METHOD, EXPOSURE APPARATUS A...
Publication number
20110122378
Publication date
May 26, 2011
Nikon Corporation
Koichi KATSURA
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
FILTER HOLDING APPARATUS, EXPOSURE APPARATUS, AND METHOD FOR PRODUC...
Publication number
20110122379
Publication date
May 26, 2011
Nikon Corporation
Koichi KATSURA
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
FILTER BOX, EXPOSURE APPARATUS, AND METHOD FOR PRODUCING DEVICE
Publication number
20110116059
Publication date
May 19, 2011
Nikon Corporation
Koichi KATSURA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus, device manufacturing method and environmental c...
Publication number
20020050572
Publication date
May 2, 2002
Nikon Corporation
Yoshitomo Nagahashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY