Koichi Kazama

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Annular member, plasma processing apparatus and plasma etching method
- Patent number 11,257,662
- Issue date Feb 22, 2022
- Tokyo Electron Limited
- Shingo Kitamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shower head, plasma processing apparatus and plasma processing method
- Patent number 9,466,468
- Issue date Oct 11, 2016
- Tokyo Electron Limited
- Nobuyuki Okayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing system
- Patent number RE40046
- Issue date Feb 12, 2008
- Tokyo Electron Limited
- Nobuyuki Okayama
- 029 - Metal working
Information Patent Grant
Processing system
- Patent number RE39969
- Issue date Jan 1, 2008
- Tokyo Electron Limited
- Nobuyuki Okayama
- 156 - Adhesive bonding and miscellaneous chemical manufacture
Information Patent Grant
Processing system
- Patent number RE39939
- Issue date Dec 18, 2007
- Tokyo Electron Limited
- Nobuyuki Okayama
- 156 - Adhesive bonding and miscellaneous chemical manufacture
Information Patent Grant
Protective member for inner surface of chamber and plasma processin...
- Patent number 6,383,333
- Issue date May 7, 2002
- Tokai Carbon Company, Ltd.
- Kazuyoshi Haino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system
- Patent number 6,334,983
- Issue date Jan 1, 2002
- Tokyo Electron Limited
- Nobuyuki Okayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Indoline compound and 5-HT.sub.3 receptor antagonist containing the...
- Patent number 5,677,326
- Issue date Oct 14, 1997
- Tokyo Tanabe Company Limited
- Shinji Tsuchiya
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Plasma processing apparatus
- Patent number 5,376,213
- Issue date Dec 27, 1994
- Tokyo Electron Limited
- Yoichi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240177973
- Publication date May 30, 2024
- TOKYO ELECTRON LIMITED
- Koki HIDAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200267826
- Publication date Aug 20, 2020
- TOKYO ELECTRON LIMITED
- Daisuke KAWADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANNULAR MEMBER, PLASMA PROCESSING APPARATUS AND PLASMA ETCHING METHOD
- Publication number 20200066496
- Publication date Feb 27, 2020
- TOKYO ELECTRON LIMITED
- Shingo KITAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWER HEAD, PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20140291286
- Publication date Oct 2, 2014
- TOKYO ELECTRON LIMITED
- Nobuyuki OKAYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND ELECTRODE PLATE, ELECTRODE SUPPORTI...
- Publication number 20080156441
- Publication date Jul 3, 2008
- TOKYO ELECTRON LIMITED
- Masahiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus, and electrode plate, electrode support...
- Publication number 20030155078
- Publication date Aug 21, 2003
- TOKYO ELECTRON LIMITED
- Masahiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inner wall protection member for chamber and plasma procressing app...
- Publication number 20030015287
- Publication date Jan 23, 2003
- TOKAI CARBON COMPANY, LTD.
- Kazuyoshi Haino
- H01 - BASIC ELECTRIC ELEMENTS

Koichi Kazama

Person

Patents Grantslast 30 patents

Annular member, plasma processing apparatus and plasma etching method

Shower head, plasma processing apparatus and plasma processing method

Processing system

Processing system

Processing system

Protective member for inner surface of chamber and plasma processin...

Processing system

Indoline compound and 5-HT.sub.3 receptor antagonist containing the...

Plasma processing apparatus

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

ANNULAR MEMBER, PLASMA PROCESSING APPARATUS AND PLASMA ETCHING METHOD

SHOWER HEAD, PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND ELECTRODE PLATE, ELECTRODE SUPPORTI...

Plasma processing apparatus, and electrode plate, electrode support...

Inner wall protection member for chamber and plasma procressing app...