Koichi Kosaka

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Chikuma, JP

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Patents Grantslast 30 patents

Information Patent Grant
Final polishing method for silicon single crystal wafer and silicon...
- Patent number 8,569,148
- Issue date Oct 29, 2013
- Shin-Etsu Handotai Co., Ltd.
- Naoto Iizuka
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
FINAL POLISHING METHOD FOR SILICON SINGLE CRYSTAL WAFER AND SILICON...
- Publication number 20100090314
- Publication date Apr 15, 2010
- Shin-Etsu Handotai Co., Ltd.
- Naoto Iizuka
- B24 - GRINDING POLISHING