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Koichi Matsunaga
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Koshi, JP
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last 30 patents
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Patent Grant
Substrate treatment apparatus, substrate treatment method, and comp...
Patent number
11,126,086
Issue date
Sep 21, 2021
Tokyo Electron Limited
Teruhiko Kodama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and methods for spin-on coating of self-assembled monolayers...
Patent number
9,418,834
Issue date
Aug 16, 2016
Tokyo Electron Limited
Ainhoa Romo Negreira
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20210317579
Publication date
Oct 14, 2021
TOKYO ELECTRON LIMITED
Koichi MATSUNAGA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20210232050
Publication date
Jul 29, 2021
TOKYO ELECTRON LIMITED
Koichi MATSUNAGA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
SUBSTRATE TREATMENT APPARATUS, SUBSTRATE TREATMENT METHOD, AND COMP...
Publication number
20190212653
Publication date
Jul 11, 2019
TOKYO ELECTRON LIMITED
Teruhiko KODAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHODS FOR SPIN-ON COATING OF SELF-ASSEMBLED MONOLAYERS...
Publication number
20150170903
Publication date
Jun 18, 2015
TOKYO ELECTRON LIMITED
Ainhoa Romo Negreira
H01 - BASIC ELECTRIC ELEMENTS