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Exposure apparatus
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Patent number 4,998,134
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Issue date Mar 5, 1991
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Canon Kabushiki Kaisha
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Junji Isohata
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G02 - OPTICS
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Movable stage mechanism
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Patent number 4,993,696
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Issue date Feb 19, 1991
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Canon Kabushiki Kaisha
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Motomu Furukawa
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Exposure apparatus
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Patent number 4,864,360
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Issue date Sep 5, 1989
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Canon Kabushiki Kaisha
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Junji Isohata
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G02 - OPTICS
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Static pressure gas bearing assembly
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Patent number 4,838,710
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Issue date Jun 13, 1989
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Canon Kabushiki Kaisha
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Jiro Ohta
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Rotary motion driving apparatus
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Patent number 4,822,182
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Issue date Apr 18, 1989
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Canon Kabushiki Kaisha
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Koichi Matsushita
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F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
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Exposure apparatus
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Patent number 4,749,867
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Issue date Jun 7, 1988
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Canon Kabushiki Kaisha
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Koichi Matsushita
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Exposure apparatus
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Patent number 4,748,477
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Issue date May 31, 1988
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Canon Kabushiki Kaisha
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Junji Isohata
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Moving mechanism
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Patent number 4,744,675
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Issue date May 17, 1988
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Canon Kabushiki Kaisha
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Shigeo Sakino
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Exposure apparatus
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Patent number 4,708,465
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Issue date Nov 24, 1987
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Canon Kabushiki Kaisha
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Junji Isohata
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Exposure apparatus
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Patent number 4,676,630
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Issue date Jun 30, 1987
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Canon Kabushiki Kaisha
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Koichi Matsushita
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY