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Koichi Matsuzaki
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Yamanashi, JP
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last 30 patents
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Patent Grant
Method for thermal stabilization of probe card and inspection appar...
Patent number
9,030,218
Issue date
May 12, 2015
Tokyo Electron Limited
Kazunari Ishii
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
METHOD FOR THERMAL STABILIZATION OF PROBE CARD AND INSPECTION APPAR...
Publication number
20130278279
Publication date
Oct 24, 2013
TOKYO ELECTRON LIMITED
Kazunari Ishii
G01 - MEASURING TESTING