Koichi Miyashita

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Yamanashi-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system, substrate processing method, and contr...
- Patent number 11,823,877
- Issue date Nov 21, 2023
- Tokyo Electron Limited
- Koichi Miyashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and processing method
- Patent number 11,276,592
- Issue date Mar 15, 2022
- Tokyo Electron Limited
- Katsuhito Hirose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing system
- Patent number 9,223,305
- Issue date Dec 29, 2015
- Tokyo Electron Limited
- Gaku Ikeda
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of detecting abnormal placement of substrate, substrate proc...
- Patent number 8,581,153
- Issue date Nov 12, 2013
- Tokyo Electron Limited
- Takashi Chino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230135618
- Publication date May 4, 2023
- TOKYO ELECTRON LIMITED
- Hiroshi HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND CONTR...
- Publication number 20210305029
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Koichi MIYASHITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20200328100
- Publication date Oct 15, 2020
- TOKYO ELECTRON LIMITED
- Katsuhito HIROSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING SYSTEM
- Publication number 20130013240
- Publication date Jan 10, 2013
- TOKYO ELECTON LIMITED
- Gaku Ikeda
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
METHOD OF DETECTING ABNORMAL PLACEMENT OF SUBSTRATE, SUBSTRATE PROC...
- Publication number 20110174800
- Publication date Jul 21, 2011
- TOKYO ELECTRON LIMITED
- Takashi Chino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...