Koichi Murakami

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Processing apparatus for processing target object
- Patent number 11,404,251
- Issue date Aug 2, 2022
- Tokyo Electron Limited
- Shin Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas shower structure and substrate processing apparatus
- Patent number 9,550,194
- Issue date Jan 24, 2017
- Tokyo Electron Limited
- Daisuke Hayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrode and plasma processing apparatus
- Patent number 8,920,598
- Issue date Dec 30, 2014
- Tokyo Electron Limited
- Daisuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature control device for target substrate, temperature contro...
- Patent number 7,988,062
- Issue date Aug 2, 2011
- Tokyo Electron Limited
- Ryo Nonaka
- G05 - CONTROLLING REGULATING
Information Patent Grant
Surface treating device and surface treating method
- Patent number 7,023,002
- Issue date Apr 4, 2006
- Tokyo Electron Limited
- Kazuya Nagaseki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING APPARATUS FOR PROCESSING TARGET OBJECT
- Publication number 20180218886
- Publication date Aug 2, 2018
- TOKYO ELECTRON LIMITED
- Shin Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UPPER ELECTRODE STRUCTURE OF PLASMA PROCESSING APPARATUS, PLASMA PR...
- Publication number 20170069470
- Publication date Mar 9, 2017
- TOKYO ELECTRON LIMITED
- Koichi Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWER HEAD ASSEMBLY, PLASMA PROCESSING APPARATUS AND METHOD FOR MA...
- Publication number 20150129112
- Publication date May 14, 2015
- TOKYO ELECTRON LIMITED
- Michishige SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODE AND PLASMA PROCESSING APPARATUS
- Publication number 20110226420
- Publication date Sep 22, 2011
- TOKYO ELECTRON LIMITED
- Daisuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SHOWER STRUCTURE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20110186229
- Publication date Aug 4, 2011
- TOKYO ELECTRON LIMITED
- Daisuke Hayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROL DEVICE FOR TARGET SUBSTRATE, TEMPERATURE CONTRO...
- Publication number 20090118872
- Publication date May 7, 2009
- TOKYO ELECTRON LIMITED
- Ryo NONAKA
- G05 - CONTROLLING REGULATING
Information Patent Application
TEMPERATURE CONTROL DEVICE
- Publication number 20080314564
- Publication date Dec 25, 2008
- TOKYO ELECTRON LIMITED
- Kazuya NAGASEKI
- G05 - CONTROLLING REGULATING
Information Patent Application
Surface treating device and surface treating method
- Publication number 20040262540
- Publication date Dec 30, 2004
- TOKYO ELECTRON LIMITED
- Kazuya Nagaseki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Koichi Murakami

Person

Patents Grantslast 30 patents

Processing apparatus for processing target object

Gas shower structure and substrate processing apparatus

Electrode and plasma processing apparatus

Temperature control device for target substrate, temperature contro...

Surface treating device and surface treating method

Patents Applicationslast 30 patents

PROCESSING APPARATUS FOR PROCESSING TARGET OBJECT

UPPER ELECTRODE STRUCTURE OF PLASMA PROCESSING APPARATUS, PLASMA PR...

SHOWER HEAD ASSEMBLY, PLASMA PROCESSING APPARATUS AND METHOD FOR MA...

ELECTRODE AND PLASMA PROCESSING APPARATUS

GAS SHOWER STRUCTURE AND SUBSTRATE PROCESSING APPARATUS

TEMPERATURE CONTROL DEVICE FOR TARGET SUBSTRATE, TEMPERATURE CONTRO...

TEMPERATURE CONTROL DEVICE

Surface treating device and surface treating method