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Koichi Nagakura
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Nirasaki-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate treatment method
Patent number
10,910,229
Issue date
Feb 2, 2021
Tokyo Electron Limited
Koichi Nagakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method, substrate processing apparatus and sub...
Patent number
10,903,083
Issue date
Jan 26, 2021
Tokyo Electron Limited
Keiko Hada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature control device for processing target object and method...
Patent number
10,192,774
Issue date
Jan 29, 2019
Tokyo Electron Limited
Yuki Hosaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus, focus ring, and susceptor
Patent number
8,124,539
Issue date
Feb 28, 2012
Tokyo Electron Limited
Shosuke Endoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing method and storage medium
Patent number
8,071,473
Issue date
Dec 6, 2011
Tokyo Electron Limited
Kazuki Narishige
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND SUB...
Publication number
20210104412
Publication date
Apr 8, 2021
TOKYO ELECTRON LIMITED
Keiko HADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT METHOD
Publication number
20180366334
Publication date
Dec 20, 2018
TOKYO ELECTRON LIMITED
Koichi NAGAKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROL DEVICE FOR PROCESSING TARGET OBJECT AND METHOD...
Publication number
20170301579
Publication date
Oct 19, 2017
TOKYO ELECTRON LIMITED
Yuki Hosaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20170243725
Publication date
Aug 24, 2017
Ryoji YAMAZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND SUB...
Publication number
20170200618
Publication date
Jul 13, 2017
TOKYO ELECTRON LIMITED
Keiko HADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS, FOCUS RING, AND SUSCEPTOR
Publication number
20110000883
Publication date
Jan 6, 2011
TOKYO ELECTRON LIMITED
Shosuke Endoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device manufacturing method and storage medium
Publication number
20090045165
Publication date
Feb 19, 2009
TOKYO ELECTRON LIMITED
Kazuki Narishige
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus, focus ring, and susceptor
Publication number
20040261946
Publication date
Dec 30, 2004
TOKYO ELECTRON LIMITED
Shosuke Endoh
H01 - BASIC ELECTRIC ELEMENTS