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Plasma processing apparatus
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Patent number 12,243,723
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Issue date Mar 4, 2025
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Tokyo Electron Limited
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Yusuke Hayasaka
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma generating method
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Patent number 10,615,005
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Issue date Apr 7, 2020
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Tokyo Electron Limited
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Koichi Nagami
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing apparatus
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Patent number 10,593,519
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Issue date Mar 17, 2020
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Tokyo Electron Limited
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Norikazu Yamada
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing method
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Patent number 10,269,539
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Issue date Apr 23, 2019
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Tokyo Electron Limited
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Kumiko Ono
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing apparatus
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Patent number 10,176,971
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Issue date Jan 8, 2019
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Tokyo Electron Limited
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Koichi Nagami
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing method
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Patent number 10,109,461
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Issue date Oct 23, 2018
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Tokyo Electron Limited
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Norikazu Yamada
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Plasma processing method
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Patent number 9,960,016
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Issue date May 1, 2018
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Tokyo Electron Limited
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Kumiko Ono
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing method
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Patent number 9,941,098
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Issue date Apr 10, 2018
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Tokyo Electron Limited
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Koichi Nagami
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing method
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Patent number 9,824,864
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Issue date Nov 21, 2017
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Tokyo Electron Limited
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Koichi Nagami
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H01 - BASIC ELECTRIC ELEMENTS