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Koichi Nagasaki
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Kokubu-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer heating apparatus and semiconductor manufacturing apparatus
Patent number
8,519,309
Issue date
Aug 27, 2013
Kyocera Corporation
Keiji Iwata
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Multi-layer piezoelectric element and injection apparatus using the...
Patent number
8,378,554
Issue date
Feb 19, 2013
Kyocera Corporation
Shigenobu Nakamura
F02 - COMBUSTION ENGINES HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
Information
Patent Grant
Wafer heating apparatus and semiconductor manufacturing apparatus
Patent number
8,071,916
Issue date
Dec 6, 2011
Kyocera Corporation
Keiji Iwata
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Wafer heating apparatus
Patent number
6,753,507
Issue date
Jun 22, 2004
Kyocera Corporation
Hiroshi Fure
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Electrostatic chuck and production method therefor
Patent number
6,215,643
Issue date
Apr 10, 2001
Kyocera Corporation
Koichi Nagasaki
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Wafer holding device
Patent number
6,108,190
Issue date
Aug 22, 2000
Kyocera Corporation
Koichi Nagasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer support member
Patent number
5,886,863
Issue date
Mar 23, 1999
Kyocera Corporation
Koichi Nagasaki
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Patents Applications
last 30 patents
Information
Patent Application
Multi-Layer Piezoelectric Element and Injection Apparatus Using the...
Publication number
20100282874
Publication date
Nov 11, 2010
KYOCERA CORPORATION
Shigenobu Nakamura
F02 - COMBUSTION ENGINES HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
Information
Patent Application
Wafer Heating Apparatus and Semiconductor Manufacturing Apparatus
Publication number
20100170884
Publication date
Jul 8, 2010
Kyocera Corporation
Keiji Iwata
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Wafer Heating Apparatus And Semiconductor Manufacturing Apparatus
Publication number
20080017627
Publication date
Jan 24, 2008
KYOCERA CORPORATION
Keiji Iwata
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Thermoelectric module and process for producing the same
Publication number
20040042181
Publication date
Mar 4, 2004
KYOCERA CORPORATION
Koichi Nagasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wafer heating apparatus
Publication number
20030015517
Publication date
Jan 23, 2003
Hiroshi Fure
H01 - BASIC ELECTRIC ELEMENTS