Koichi Nakaune

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Hikari-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of processing a sample surface having a masking material and...
- Patent number 6,960,533
- Issue date Nov 1, 2005
- Hitachi, Ltd.
- Koichi Nakaune
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DRY ETCHING METHOD OF HIGH-K FILM
- Publication number 20110171833
- Publication date Jul 14, 2011
- Koichi NAKAUNE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD FOR ETCHING SAMPLE
- Publication number 20090081872
- Publication date Mar 26, 2009
- Hitoshi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRY ETCHING METHOD OF HIGH-K FILM
- Publication number 20090065479
- Publication date Mar 12, 2009
- Koichi NAKAUNE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dry etching method
- Publication number 20070090090
- Publication date Apr 26, 2007
- Koichi Nakaune
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of processing a sample surface having a masking material and...
- Publication number 20030080091
- Publication date May 1, 2003
- Koichi Nakaune
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus of processing a sample surface and method thereof
- Publication number 20010017190
- Publication date Aug 30, 2001
- Koichi Nakaune
- H01 - BASIC ELECTRIC ELEMENTS