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Koichi Obata

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  • Koshi-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Liquid processing apparatus and liquid processing method
    • Patent number 10,128,136
    • Issue date Nov 13, 2018
    • Tokyo Electron Limited
    • Masahiro Fukuda
    • B08 - CLEANING
  • Information Patent Grant

    Coating method
    • Patent number 8,808,798
    • Issue date Aug 19, 2014
    • Tokyo Electron Limited
    • Takahiro Kitano
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Coating method
    • Patent number 8,551,563
    • Issue date Oct 8, 2013
    • Tokyo Electron Limited
    • Takahiro Kitano
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Coating apparatus and method
    • Patent number 8,256,370
    • Issue date Sep 4, 2012
    • Tokyo Electron Limited
    • Takahiro Kitano
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Coating apparatus and method
    • Patent number 8,225,737
    • Issue date Jul 24, 2012
    • Tokyo Electron Limited
    • Takahiro Kitano
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

  • Information Patent Application

    LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
    • Publication number 20180047592
    • Publication date Feb 15, 2018
    • TOKYO ELECTRON LIMITED
    • Masahiro Fukuda
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    COATING METHOD
    • Publication number 20120301612
    • Publication date Nov 29, 2012
    • TOKYO ELECTRON LIMITED
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    COATING APPARATUS AND METHOD
    • Publication number 20120213925
    • Publication date Aug 23, 2012
    • TOKYO ELECTRON LIMITED
    • Takahiro KITANO
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    COATING APPARATUS AND METHOD
    • Publication number 20090285984
    • Publication date Nov 19, 2009
    • TOKYO ELECTRON LIMITED
    • Takahiro KITANO
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    COATING APPARATUS AND METHOD
    • Publication number 20090285991
    • Publication date Nov 19, 2009
    • TOKYO ELECTRON LIMITED
    • Takahiro Kitano
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY