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Koichi ORIHIRA
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Kyoto, JP
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Patents Grants
last 30 patents
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Patent Grant
Ion irradiation apparatus and ion irradiation method
Patent number
9,230,776
Issue date
Jan 5, 2016
Nissin Ion Equipment Co., Ltd.
Takeshi Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Substrate holding device and manufacturing method therefor
Patent number
5,685,363
Issue date
Nov 11, 1997
Nissin Electric Co., Ltd.
Koichi Orihira
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ION IRRADIATION APPARATUS AND ION IRRADIATION METHOD
Publication number
20150262790
Publication date
Sep 17, 2015
NISSIN ION EQUIPMENT CO., LTD.
Takeshi MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS