Koichi Sakamoto

Person

Tokyo-To, JP

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for performing semiconductor processing on target...
- Patent number 8,153,451
- Issue date Apr 10, 2012
- Tokyo Electron Limited
- Koichi Sakamoto
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Semiconductor manufacturing apparatus, method of detecting abnormal...
- Patent number 7,751,921
- Issue date Jul 6, 2010
- Tokyo Electron Limited
- Koichi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for performing semiconductor processing on substr...
- Patent number 7,179,334
- Issue date Feb 20, 2007
- Tokyo Electron Limited
- Koichi Sakamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Determining method of thermal processing condition
- Patent number 7,138,607
- Issue date Nov 21, 2006
- Tokyo Electron Limited
- Wenling Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment method and heat treatment device
- Patent number 6,975,917
- Issue date Dec 13, 2005
- Tokyo Electron Limited
- Koichi Sakamoto
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Heat treatment apparatus, calibration method for temperature measur...
- Patent number 6,922,522
- Issue date Jul 26, 2005
- Tokyo Electron Limited
- Wenling Wang
- G01 - MEASURING TESTING
Information Patent Grant
Heat treatment apparatus and controller for heat treatment apparatu...
- Patent number 6,847,015
- Issue date Jan 25, 2005
- Tokyo Electron Limited
- Wenling Wang
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Batch-type heat treatment apparatus and control method for the batc...
- Patent number 6,803,548
- Issue date Oct 12, 2004
- Tokyo Electron Limited
- Wenling Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Determining method of thermal processing condition
- Patent number 6,787,377
- Issue date Sep 7, 2004
- Tokyo Electron Limited
- Wenling Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Batch type heat treatment system, method for controlling same, and...
- Patent number 6,730,885
- Issue date May 4, 2004
- Tokyo Electron Limited
- Fujio Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus, calibration method for temperature measur...
- Patent number 6,622,104
- Issue date Sep 16, 2003
- Tokyo Electron Limited
- Wenling Wang
- G01 - MEASURING TESTING
Information Patent Grant
Method of determining set temperature trajectory for heat treatment...
- Patent number 6,495,805
- Issue date Dec 17, 2002
- Tokyo Electron Limited
- Koichi Sakamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of temperature-calibrating heat treating apparatus
- Patent number 6,329,643
- Issue date Dec 11, 2001
- Tokyo Electron Limited
- Fujio Suzuki
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
Semiconductor Manufacturing Apparatus, Method of Detecting Abnormal...
- Publication number 20080208385
- Publication date Aug 28, 2008
- Koichi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR PERFORMING SEMICONDUCTOR PROCESSING ON TARGET...
- Publication number 20070131537
- Publication date Jun 14, 2007
- TOKYO ELECTRON LIMITED
- KOICHI SAKAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat treating system and heat treating method
- Publication number 20060099805
- Publication date May 11, 2006
- Takehiko Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat treatment method and heat treatment device
- Publication number 20040238519
- Publication date Dec 2, 2004
- Koichi Sakamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Determining method of thermal processing condition
- Publication number 20040226933
- Publication date Nov 18, 2004
- Wenling Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and method for performing semiconductor processing on substr...
- Publication number 20040159284
- Publication date Aug 19, 2004
- Koichi Sakamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat treatment apparatus, calibration method for temperature measur...
- Publication number 20040005147
- Publication date Jan 8, 2004
- Wenling Wang
- G01 - MEASURING TESTING
Information Patent Application
Method of determining heat treatment conditions
- Publication number 20030109071
- Publication date Jun 12, 2003
- Wenling Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of processing wafer
- Publication number 20020127828
- Publication date Sep 12, 2002
- Fujio Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heat treatment apparatus and controller for heat treatment apparatu...
- Publication number 20020074324
- Publication date Jun 20, 2002
- Wenling Wang
- C30 - CRYSTAL GROWTH
Information Patent Application
Heat treatment apparatus, calibration method for temperature measur...
- Publication number 20020069025
- Publication date Jun 6, 2002
- Wenling Wang
- G01 - MEASURING TESTING
Information Patent Application
Batch-type heat treatment apparatus and control method for the batc...
- Publication number 20020045146
- Publication date Apr 18, 2002
- Wenling Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Batch type heat treatment system, method for controlling same, and...
- Publication number 20020014483
- Publication date Feb 7, 2002
- Fujio Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of determining set temperature trajectory for heat treatment...
- Publication number 20020001788
- Publication date Jan 3, 2002
- Koichi Sakamoto
- H01 - BASIC ELECTRIC ELEMENTS

Koichi Sakamoto

Person

Patents Grantslast 30 patents

System and method for performing semiconductor processing on target...

Semiconductor manufacturing apparatus, method of detecting abnormal...

System and method for performing semiconductor processing on substr...

Determining method of thermal processing condition

Heat treatment method and heat treatment device

Heat treatment apparatus, calibration method for temperature measur...

Heat treatment apparatus and controller for heat treatment apparatu...

Batch-type heat treatment apparatus and control method for the batc...

Determining method of thermal processing condition

Batch type heat treatment system, method for controlling same, and...

Heat treatment apparatus, calibration method for temperature measur...

Method of determining set temperature trajectory for heat treatment...

Method of temperature-calibrating heat treating apparatus

Patents Applicationslast 30 patents

Semiconductor Manufacturing Apparatus, Method of Detecting Abnormal...

SYSTEM AND METHOD FOR PERFORMING SEMICONDUCTOR PROCESSING ON TARGET...

Heat treating system and heat treating method

Heat treatment method and heat treatment device

Determining method of thermal processing condition

System and method for performing semiconductor processing on substr...

Heat treatment apparatus, calibration method for temperature measur...

Method of determining heat treatment conditions

Method of processing wafer

Heat treatment apparatus and controller for heat treatment apparatu...

Heat treatment apparatus, calibration method for temperature measur...

Batch-type heat treatment apparatus and control method for the batc...

Batch type heat treatment system, method for controlling same, and...

Method of determining set temperature trajectory for heat treatment...