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Koichi Sekido
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Yamanashi-Ken, JP
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Patents Grants
last 30 patents
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Patent Grant
Processing system and method for operating the same
Patent number
8,467,895
Issue date
Jun 18, 2013
Tokyo Electron Limited
Koichi Sekido
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE TREATMENT APPARATUS, SUBSTRATE TREATMENT METHOD AND STORA...
Publication number
20100168889
Publication date
Jul 1, 2010
TOKYO ELECTRON LIMITED
Koichi SEKIDO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Processing System and Method for Operating the Same
Publication number
20090226294
Publication date
Sep 10, 2009
TOKYO ELECTRON LIMITED
Koichi Sekido
H01 - BASIC ELECTRIC ELEMENTS