Koichi TASAKA

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KANAGAWA, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for liquid treatment of wafer shaped articles and liquid...
- Patent number 9,589,818
- Issue date Mar 7, 2017
- Lam Research AG
- Koichi Tasaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES AND LIQUID...
- Publication number 20140174657
- Publication date Jun 26, 2014
- LAM RESEARCH AG
- Koichi TASAKA
- H01 - BASIC ELECTRIC ELEMENTS