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Koichi Tateshita
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Nirasaki City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
10,950,418
Issue date
Mar 16, 2021
Tokyo Electron Limited
Koichi Tateshita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
10,950,415
Issue date
Mar 16, 2021
Tokyo Electron Limited
Koichi Tateshita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gate valve and substrate processing system using same
Patent number
8,419,337
Issue date
Apr 16, 2013
Tokyo Electron Limited
Koichi Tateshita
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Plasma processing device
Patent number
7,338,576
Issue date
Mar 4, 2008
Tokyo Electron Limited
Hiroo Ono
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20200185199
Publication date
Jun 11, 2020
TOKYO ELECTRON LIMITED
Koichi TATESHITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20200168441
Publication date
May 28, 2020
TOKYO ELECTRON LIMITED
Koichi TATESHITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GATE VALVE AND SUBSTRATE PROCESSING SYSTEM USING SAME
Publication number
20130004267
Publication date
Jan 3, 2013
TOKYO ELECTRON LIMITED
Koichi TATESHITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAGNETIC FIELD GENERATOR FOR MAGNETRON PLASMA
Publication number
20110232846
Publication date
Sep 29, 2011
Shin-Etsu Chemical Co., Ltd.
Koji MIYATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GATE VALVE AND SUBSTRATE PROCESSING SYSTEM USING SAME
Publication number
20110033266
Publication date
Feb 10, 2011
TOKYO ELECTRON LIMITED
Koichi Tateshita
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
Magnetron plasma-use magnetic field generation device
Publication number
20050211383
Publication date
Sep 29, 2005
Koji Miyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing device
Publication number
20040238125
Publication date
Dec 2, 2004
Hiroo Ono
H01 - BASIC ELECTRIC ELEMENTS