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Koichi Yamazaki
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Nirasaki, JP
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last 30 patents
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Patent Grant
Chamber block
Patent number
D678228
Issue date
Mar 19, 2013
Tokyo Electron Limited
Kouki Suzuki
D13 - Equipment for production, distribution, or transformation of energy
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Patent Grant
Liner for plasma processing apparatus
Patent number
D658692
Issue date
May 1, 2012
Tokyo Electron Limited
Kouki Suzuki
D15 - Machines not elsewhere specified