Koichiro HARADA

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, method for manufacturing semiconduc...
- Patent number 9,748,132
- Issue date Aug 29, 2017
- Hitachi Kokusai Electric Inc.
- Koichiro Harada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20120252220
- Publication date Oct 4, 2012
- Hitachi Kokusai Electric Inc.
- Koichiro HARADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20100227478
- Publication date Sep 9, 2010
- Hitachi Kokusai Electric Inc.
- Koichiro HARADA
- H01 - BASIC ELECTRIC ELEMENTS