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Koichiro Ichikawa
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Nagano-ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Polishing apparatus and method of polishing work
Patent number
8,333,882
Issue date
Dec 18, 2012
Fujikoshi Machinery Corp.
Unkai Sato
B24 - GRINDING POLISHING
Information
Patent Grant
Method of and apparatus for mirror-like polishing wafer chamfer wit...
Patent number
6,332,828
Issue date
Dec 25, 2001
Shin-Etsu Handotai Co., Ltd.
Fumihiko Hasegawa
B24 - GRINDING POLISHING
Information
Patent Grant
Method of and apparatus for mirror-like polishing wafer chamfer wit...
Patent number
6,113,463
Issue date
Sep 5, 2000
Shin-Etsu Handotai Co., Ltd.
Fumihiko Hasegawa
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for polishing peripheral portion of wafer
Patent number
5,928,066
Issue date
Jul 27, 1999
Shin-Etsu Handotai Co., Ltd.
Fumihiko Hasegawa
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for polishing peripheral portion of wafer
Patent number
5,766,065
Issue date
Jun 16, 1998
Shin-Etsu Handotai Co., Ltd.
Fumihiko Hasegawa
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for polishing the notch of a wafer
Patent number
5,733,181
Issue date
Mar 31, 1998
Shin-Etsu Handotai Co., Ltd.
Fumihiko Hasegawa
B24 - GRINDING POLISHING
Information
Patent Grant
Method for mirror-polishing chamfered portion of wafer and mirror-p...
Patent number
5,727,990
Issue date
Mar 17, 1998
Shin-Etsu Handotai Co., Ltd.
Fumihiko Hasegawa
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for polishing the periphery portion of a wafer
Patent number
5,476,413
Issue date
Dec 19, 1995
Shin-Etsu Handotai Co., Ltd.
Fumihiko Hasegawa
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for polishing notch portion of wafer
Patent number
5,458,529
Issue date
Oct 17, 1995
Shin-Etsu Handotai Co., Ltd.
Fumihiko Hasegawa
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus for notch portion of wafer
Patent number
5,429,544
Issue date
Jul 4, 1995
Shin-Etsu Handotal Co., Ltd.
Fumihiko Hasegawa
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
WAFER HEAD TEMPLATE FOR CHEMICAL MECHANICAL POLISHING AND A METHOD...
Publication number
20100112905
Publication date
May 6, 2010
Leonard Borucki
B24 - GRINDING POLISHING
Information
Patent Application
METHOD AND APPARATUS FOR DETERMINING SHEAR FORCE BETWEEN THE WAFER...
Publication number
20100099333
Publication date
Apr 22, 2010
Fransisca Maria Astrid Sudargho
B24 - GRINDING POLISHING
Information
Patent Application
Polishing apparatus and method of polishing work
Publication number
20070108067
Publication date
May 17, 2007
Fujikoshi Machinery Corp.
Unkai Sato
B24 - GRINDING POLISHING