Koichiro Kanzaki

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 10,928,732
- Issue date Feb 23, 2021
- Tokyo Electron Limited
- Hironobu Hyakutake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 10,458,010
- Issue date Oct 29, 2019
- Tokyo Electron Limited
- Hironobu Hyakutake
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20170037499
- Publication date Feb 9, 2017
- TOKYO ELECTRON LIMITED
- Hironobu Hyakutake
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20170025268
- Publication date Jan 26, 2017
- TOKYO ELECTRON LIMITED
- Hironobu Hyakutake
- H01 - BASIC ELECTRIC ELEMENTS