Koichiro Komatsu

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Surface inspection apparatus and surface inspection method
- Patent number 8,687,182
- Issue date Apr 1, 2014
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection apparatus and surface inspection method
- Patent number 8,441,627
- Issue date May 14, 2013
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Measuring device and measuring method
- Patent number 8,049,901
- Issue date Nov 1, 2011
- Nikon Corporation
- Hiroshi Aoki
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection apparatus and surface inspection method
- Patent number 7,834,993
- Issue date Nov 16, 2010
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Microscope and immersion objective lens
- Patent number 7,324,274
- Issue date Jan 29, 2008
- Nikon Corporation
- Koichiro Komatsu
- G02 - OPTICS
Information Patent Grant
Surface inspection apparatus and surface inspection method
- Patent number 7,298,471
- Issue date Nov 20, 2007
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection method, surface inspection apparatus, and record...
- Patent number 6,774,987
- Issue date Aug 10, 2004
- Nikon Corporation
- Koichiro Komatsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect testing apparatus and defect testing method
- Patent number 6,563,577
- Issue date May 13, 2003
- Nikon Corporation
- Takeo Oomori
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for surface inspection
- Patent number 6,512,578
- Issue date Jan 28, 2003
- Nikon Corporation
- Koichiro Komatsu
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection apparatus and method
- Patent number 6,313,913
- Issue date Nov 6, 2001
- Nikon Corporation
- Yumi Nakagawa
- G01 - MEASURING TESTING
Information Patent Grant
Image detection apparatus
- Patent number 6,097,483
- Issue date Aug 1, 2000
- Nikon Corporation
- Koichiro Komatsu
- G01 - MEASURING TESTING
Information Patent Grant
Optical detection system for detecting defects and/or particles on...
- Patent number 5,907,396
- Issue date May 25, 1999
- Nikon Corporation
- Koichiro Komatsu
- G01 - MEASURING TESTING
Information Patent Grant
Position detection apparatus and aligner comprising same
- Patent number 5,859,707
- Issue date Jan 12, 1999
- Nikon Corporation
- Masahiro Nakagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Adjustable beam and interference fringe position
- Patent number 5,171,999
- Issue date Dec 15, 1992
- Nikon Corporation
- Koichiro Komatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection apparatus with adjustable beam and interference...
- Patent number 5,070,250
- Issue date Dec 3, 1991
- Nikon Corporation
- Koichiro Komatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SURFACE INSPECTION APPARATUS AND SURFACE INSPECTION METHOD
- Publication number 20130100448
- Publication date Apr 25, 2013
- Nikon Corporation
- Kazuhiko FUKAZAWA
- G01 - MEASURING TESTING
Information Patent Application
Surface inspection apparatus and surface inspection method
- Publication number 20100225906
- Publication date Sep 9, 2010
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Application
Measuring device and measuring method
- Publication number 20090237677
- Publication date Sep 24, 2009
- Nikon Corporation
- Hiroshi Aoki
- G01 - MEASURING TESTING
Information Patent Application
Surface inspection apparatus and surface inspection method
- Publication number 20080094628
- Publication date Apr 24, 2008
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Application
Surface inspection apparatus and surface inspection method
- Publication number 20060192953
- Publication date Aug 31, 2006
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Application
Microscope and immersion objective lens
- Publication number 20050179997
- Publication date Aug 18, 2005
- Nikon Corporation
- Koichiro Komatsu
- G02 - OPTICS
Information Patent Application
Surface inspection method, surface inspection apparatus, and record...
- Publication number 20040063232
- Publication date Apr 1, 2004
- Nikon Corporation
- Koichiro Komatsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for surface inspection
- Publication number 20030112428
- Publication date Jun 19, 2003
- NIKON CORPORATION
- Takeo Oomori
- G01 - MEASURING TESTING
Information Patent Application
Defect testing apparatus and defect testing method
- Publication number 20020005946
- Publication date Jan 17, 2002
- Takeo Oomori
- G01 - MEASURING TESTING

Koichiro Komatsu

Person

Patents Grantslast 30 patents

Surface inspection apparatus and surface inspection method

Surface inspection apparatus and surface inspection method

Measuring device and measuring method

Surface inspection apparatus and surface inspection method

Microscope and immersion objective lens

Surface inspection apparatus and surface inspection method

Surface inspection method, surface inspection apparatus, and record...

Defect testing apparatus and defect testing method

Method and apparatus for surface inspection

Surface inspection apparatus and method

Image detection apparatus

Optical detection system for detecting defects and/or particles on...

Position detection apparatus and aligner comprising same

Adjustable beam and interference fringe position

Position detection apparatus with adjustable beam and interference...

Patents Applicationslast 30 patents

SURFACE INSPECTION APPARATUS AND SURFACE INSPECTION METHOD

Surface inspection apparatus and surface inspection method

Measuring device and measuring method

Surface inspection apparatus and surface inspection method

Surface inspection apparatus and surface inspection method

Microscope and immersion objective lens

Surface inspection method, surface inspection apparatus, and record...

Method and apparatus for surface inspection

Defect testing apparatus and defect testing method