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Koichiro Mizukami
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Akishima, JP
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last 30 patents
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Patent Grant
Apparatus for selective deposition of metal thin film
Patent number
4,979,466
Issue date
Dec 25, 1990
Hitachi, Ltd.
Eisuke Nishitani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Method for selective deposition of metal thin film
Patent number
4,830,891
Issue date
May 16, 1989
Hitachi, Ltd.
Eisuke Nishitani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...