Koichiro NAKAMURA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma stability determination method and plasma processing apparatus
- Patent number 10,074,550
- Issue date Sep 11, 2018
- Tokyo Electron Limited
- Ryo Miyama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS INCLUDING...
- Publication number 20240222085
- Publication date Jul 4, 2024
- TOKYO ELECTRON LIMITED
- Koichiro NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA STABILITY DETERMINING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20170229332
- Publication date Aug 10, 2017
- TOKYO ELECTRON LIMITED
- Ryo MIYAMA
- H01 - BASIC ELECTRIC ELEMENTS