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Koichiro Nakanishi

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  • Amagasaki, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Ion implanter
    • Patent number 5,072,125
    • Issue date Dec 10, 1991
    • Mitsubishi Denki Kabushiki Kaisha
    • Koichiro Nakanishi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processor
    • Patent number 4,947,085
    • Issue date Aug 7, 1990
    • Mitsubishi Denki Kabushiki Kaisha
    • Koichiro Nakanishi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Apparatus for uniformly distributing plasma over a substrate
    • Patent number 4,894,510
    • Issue date Jan 16, 1990
    • Mitsubishi Denki Kabushiki Kaisha
    • Koichiro Nakanishi
    • H01 - BASIC ELECTRIC ELEMENTS