Koji Ando

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and maintenance method thereof
- Patent number 9,613,837
- Issue date Apr 4, 2017
- Tokyo Electron Limited
- Shigeru Senzaki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND MAINTENANCE METHOD THEREOF
- Publication number 20150086302
- Publication date Mar 26, 2015
- TOKYO ELECTRON LIMITED
- Shigeru Senzaki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Temperature control method and apparatus, and plasma processing app...
- Publication number 20060213763
- Publication date Sep 28, 2006
- TOKYO ELECTRON LIMITED
- Masao Furuya
- H01 - BASIC ELECTRIC ELEMENTS