Koji Ato

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Kanagawa-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Polishing device and substrate processing device
- Patent number 7,850,817
- Issue date Dec 14, 2010
- Ebara Corporation
- Satoshi Wakabayashi
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for polishing a substrate
- Patent number 6,494,985
- Issue date Dec 17, 2002
- Ebara Corporation
- Hiroshi Sotozaki
- B24 - GRINDING POLISHING
Information Patent Grant
Cleaning apparatus
- Patent number 6,439,962
- Issue date Aug 27, 2002
- Ebara Corporation
- Koji Ato
- B08 - CLEANING
Information Patent Grant
Apparatus for cleaning substrate
- Patent number 6,248,009
- Issue date Jun 19, 2001
- Ebara Corporation
- Kenya Ito
- B08 - CLEANING
Information Patent Grant
Cleaning apparatus
- Patent number 6,148,463
- Issue date Nov 21, 2000
- Ebara Corporation
- Noburu Shimizu
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Substrate cleaning apparatus and method
- Publication number 20050252535
- Publication date Nov 17, 2005
- Yukiko Nishioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dehydration drying method and apparatus, and substrate processing a...
- Publication number 20050081890
- Publication date Apr 21, 2005
- Koji Ato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Polishing device and substrate processing device
- Publication number 20040261944
- Publication date Dec 30, 2004
- Satoshi Wakabayashi
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for polishing a substrate
- Publication number 20040155013
- Publication date Aug 12, 2004
- Hiroshi Sotozaki
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for polishing a substrate
- Publication number 20030051812
- Publication date Mar 20, 2003
- Hiroshi Sotozaki
- B24 - GRINDING POLISHING