Koji Atoh

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Kanagawa-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning apparatus and cleaning member
- Patent number 6,842,933
- Issue date Jan 18, 2005
- Ebara Corporation
- Fumitoshi Oikawa
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus and cleaning member
- Patent number 6,651,287
- Issue date Nov 25, 2003
- Ebara Corporation
- Fumitoshi Oikawa
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus
- Patent number 6,643,882
- Issue date Nov 11, 2003
- Ebara Corporation
- Hiroshi Sotozaki
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus
- Patent number 6,560,809
- Issue date May 13, 2003
- Ebara Corporation
- Koji Atoh
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Substrate cleaning apparatus and cleaning member
- Publication number 20040074029
- Publication date Apr 22, 2004
- Fumitoshi Oikawa
- B08 - CLEANING
Information Patent Application
Substrate cleaning apparatus
- Publication number 20020029431
- Publication date Mar 14, 2002
- Fumitoshi Oikawa
- B08 - CLEANING
Information Patent Application
Substrate cleaning apparatus, substrate cleaning method and substra...
- Publication number 20020007840
- Publication date Jan 24, 2002
- Koji Atoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate cleaning apparatus and cleaning member
- Publication number 20020004962
- Publication date Jan 17, 2002
- Fumitoshi Oikawa
- H01 - BASIC ELECTRIC ELEMENTS